JPH0625735Y2 - 精密移動装置 - Google Patents

精密移動装置

Info

Publication number
JPH0625735Y2
JPH0625735Y2 JP1986116536U JP11653686U JPH0625735Y2 JP H0625735 Y2 JPH0625735 Y2 JP H0625735Y2 JP 1986116536 U JP1986116536 U JP 1986116536U JP 11653686 U JP11653686 U JP 11653686U JP H0625735 Y2 JPH0625735 Y2 JP H0625735Y2
Authority
JP
Japan
Prior art keywords
feed screw
base
metal bellows
moving
moving device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986116536U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6322457U (en]
Inventor
克房 田中
透 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1986116536U priority Critical patent/JPH0625735Y2/ja
Publication of JPS6322457U publication Critical patent/JPS6322457U/ja
Application granted granted Critical
Publication of JPH0625735Y2 publication Critical patent/JPH0625735Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
  • Moving Of Heads (AREA)
JP1986116536U 1986-07-28 1986-07-28 精密移動装置 Expired - Lifetime JPH0625735Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986116536U JPH0625735Y2 (ja) 1986-07-28 1986-07-28 精密移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986116536U JPH0625735Y2 (ja) 1986-07-28 1986-07-28 精密移動装置

Publications (2)

Publication Number Publication Date
JPS6322457U JPS6322457U (en]) 1988-02-15
JPH0625735Y2 true JPH0625735Y2 (ja) 1994-07-06

Family

ID=31001220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986116536U Expired - Lifetime JPH0625735Y2 (ja) 1986-07-28 1986-07-28 精密移動装置

Country Status (1)

Country Link
JP (1) JPH0625735Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220096901A (ko) * 2020-12-31 2022-07-07 포항공과대학교 산학협력단 초고진공용 정밀 변위구동 액추에이터

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56127521U (en]) * 1980-02-25 1981-09-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220096901A (ko) * 2020-12-31 2022-07-07 포항공과대학교 산학협력단 초고진공용 정밀 변위구동 액추에이터

Also Published As

Publication number Publication date
JPS6322457U (en]) 1988-02-15

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